1. Design for Manufacturing With Emerging Nanolithography;Pan;In IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems,2013
2. Microlithography
3. Layout Impact of Resolution Enhancement Techniques: Impediment or Opportunity;Liebmann,2003
4. Three DfM Challenges: Random Defects, Thickness Variation, and Printability Variation;Charles,2006
5. Yield enhancement with DFM