Author:
Barouch Eytan,Hollerbach Uwe,Orszag Steven A.,Allen Mary T.,Calabrese Gary S.
Cited by
5 articles.
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1. Techniques and Tools for Optical Lithography;Handbook of VLSI Microlithography;2001
2. Manufacturability of Electronic Chips;Theoretical and Computational Fluid Dynamics;1998-01-01
3. Simulation of Chemical Amplification Resists;Japanese Journal of Applied Physics;1992-12-30
4. Sub-0.5 micron lithography with i-line acid-hardened negative resists;Microelectronic Engineering;1992-03
5. Modeling and characterization of a 0.5 μm deep ultraviolet process;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1991-11