1. Resolution enhancement of 157 nm lithography by liquid immersion;Switkes,2002
2. Research on generating various polarization-modes in polarized illumination system;Jinping,2013
3. Benefiting from polarization effects on high-NA imaging;Smith,2004
4. Imaging enhancements by polarized illumination: theory and experimental verification;Kohler,2005
5. Challenges with hyper-NA (NA>1.0) polarized light lithography for sub λ/4 resolution;Flagello,2005