1. Enabling sub-10nm node lithography: presenting the NXE:3400B EUV scanner;van de Kerkhof,2017
2. Thirty years in the making: EUV in High Volume Manufacturing;Gomba,2018
3. AIMS™ EUV - the actinic aerial image review platform for EUV masks’;Hellweg,2011
4. To repair or not to repair: with FAVOR there is no question;Garetto,2016
5. Actinic Review of EUV Masks: Performance Data and Status of the AIMS™ EUV System;Hellweg,2017