Modelling of coherence scanning interferometry for complex surfaces based on a boundary element method-Reference-Cited by-同舟云学术

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Modelling of coherence scanning interferometry for complex surfaces based on a boundary element method

Published:2019-06-21 Issue: Volume: Page:
ISSN:
Container-title:Modeling Aspects in Optical Metrology VII
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Author:

Thomas Matthew,Su Rong,Nikolaev Nikolay,Coupland Jeremy M.,Leach Richard

Publisher

SPIE

Reference38 articles.

1. The Meaning and Measure of Vertical Resolution in Optical Surface Topography Measurement

2. Optical Measurement of Surface Topography

3. Three-dimensional sensing of rough surfaces by coherence radar

4. Efficient nonlinear algorithm for envelope detection in white light interferometry

5. Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain

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1. Accurate Measurements of Droplet Volume With Coherence Scanning Interferometry;IEEE Transactions on Instrumentation and Measurement;2023

2. 基于FDTD的高深宽比沟槽结构低相干显微干涉信号仿真分析;ACTA PHOTONICA SINICA;2023

3. 3D modeling of coherence scanning interferometry on 2D surfaces using FEM;Optics Express;2020-12-16

4. Fourier optics modelling of instrument response for interference microscopy;Interferometry XX;2020-08-21

5. Model-based dimensional optical metrology;Optics and Photonics for Advanced Dimensional Metrology;2020-04-01

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