X-ray transmission lenses by deep x-ray lithography and LIGA technique: first results and fundamental limits-Reference-Cited by-同舟云学术

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X-ray transmission lenses by deep x-ray lithography and LIGA technique: first results and fundamental limits

Published:1999-03-10 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
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Author:

Kupka Roland K.,Bouamrane Faycal,Roulliay Marc,Megtert Stephan

Publisher

SPIE

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. X-ray lithography: Some history, current status and future prospects;Microelectronic Engineering;2016-08

2. Microfocussing of synchrotron X-rays using X-ray refractive lens developed at Indus-2 deep X-ray lithography beamline;Pramana;2014-07

3. Fabrication of compound refractive lens using soft and deep X-ray lithography beamline on Indus-2;AIP Conference Proceedings;2012

4. Fabrication of PMMA X-ray Compound Refractive Lenses for the Pohang Light Source and Performance Tests;Journal of the Korean Physical Society;2007-10-15

5. Near-diffraction limited coherent x-ray focusing using planar refractive lenses made of epoxy SU-8 resist;SPIE Proceedings;2004-11-04

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