Author:
Bourguignon Thibaut,Le Gratiet Bertrand,Pradelles Jonathan,Bérard-Bergery Sébastien,Valade Charles,Schuch Nivea G.,Possémé Nicolas
Cited by
2 articles.
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1. Small angle x-ray scattering overlay metrology for advanced nodes;Metrology, Inspection, and Process Control XXXVIII;2024-04-10
2. 极紫外光刻中的边缘放置误差控制;Chinese Journal of Lasers;2024