Author:
Millward Dan B.,Lugani Gurpreet S.,Khurana Ranjan,Light Scott L.,Niroomand Ardavan,Hustad Philip D.,Trefonas Peter,Chang Shih-wei,Lee Christopher N.,Quach Dung
Reference14 articles.
1. Fabrication of Lithographically Defined Chemically Patterned Polymer Brushes and Mats
2. Pattern scaling with directed self assembly through lithography and etch process integration;Rathsack,2012
3. Personal correspondence with Roel Gronheid, IMEC.
4. Defect source analysis of directed self-assembly process
5. Defect source analysis of directed self-assembly process (DSA of DSA);Delgadillo,2013
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