Does interferometry work? A critical look at the foundations of interferometric surface topography measurement-Reference-Cited by-同舟云学术

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Does interferometry work? A critical look at the foundations of interferometric surface topography measurement

Published:2019-09-03 Issue: Volume: Page:
ISSN:
Container-title:Applied Optical Metrology III
language:
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Author:

de Groot Peter J.,Colonna de Lega Xavier,Su Rong,Leach Richard K.

Publisher

SPIE

Reference52 articles.

1. Phase-shifting via wavelength tuning in very large aperture interferometers;Deck,1999

2. Principles of interference microscopy for the measurement of surface topography

3. Surface-height measurement noise in interference microscopy;de Groot;Proc. SPIE,2018

4. Fourier-transform phase-shifting interferometry

5. Interference microscopy for clean air – how optical metrology is improving quality control of fuel injection systems;Sachs,2014

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2. Linearizing the vertical scale of an interferometric microscope and its effect on step-height measurement;Surface Topography: Metrology and Properties;2024-05-08

3. Comparison of Fourier optics-based methods for modeling coherence scanning interferometry;Optical Engineering;2024-04-12

4. Sensitivities of surface texture parameters to measurement errors – A review;Measurement;2024-03

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