1. Self-Assembly Patterning for sub-15nm Half-Pitch: A Transition from Lab to Fab;Bencher,2011
2. Directed Self-Assembly Defectivity Assessment (Part II);Bencher,2012
3. Pattern scaling with directed self assembly through lithography and etch process integration;Rathsack,2012
4. All track directed self-assembly of block copolymers: process flow and origin of defects;Rincon Delgadillo,2012
5. Pattern density multiplication by direct self assembly of block copolymers: toward 300mm CMOS requirements;Tiron,2012