Self-actuated, self-sensing cantilever for fast CD measurement-Reference-Cited by-同舟云学术

Self-actuated, self-sensing cantilever for fast CD measurement

Published:2015-03-19 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
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Author:

Ahmad Ahmad,Ivanov Tzvetan,Reum Alexander,Guliyev Elshad,Angelov Tihomir,Schuh Andreas,Kaestner Marcus,Atanasov Ivaylo,Hofer Manuel,Holz Mathias,Rangelow Ivo W.

Publisher

SPIE

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1. Sharp GaN nanowires used as field emitter on active cantilevers for scanning probe lithography;Journal of Vacuum Science & Technology B;2018-11

2. Scanning probe-based high-accuracy overlay alignment concept for lithography applications;Applied Physics A;2016-12-26

3. Large area fast-AFM scanning with active “Quattro” cantilever arrays;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2016-11

4. Tip-based nanolithography methods and materials;Materials and Processes for Next Generation Lithography;2016

5. Advanced electric-field scanning probe lithography on molecular resist using active cantilever;Journal of Micro/Nanolithography, MEMS, and MOEMS;2015-06-10