Author:
Ionescu Radu C.,Hurley Paul,Apostol Stefan
Reference25 articles.
1. Fast optical proximity correction: analytical method,;Shioiri,1995
2. Fast sparse aerial-image calculation for OPC,;Cobb,1995
3. Inverse lithography technology principles in practice: Unintuitive patterns,;Liu,2005
4. Binary image synthesis using mixed linear integer programming
5. Binary and phase shifting mask design for optical lithography