1. The analysis of EUV mask defects using a wafer defect inspection system;Cho,2010
2. Defect source analysis of directed self-assembly process (DSA of DSA);Delgadillo,2013
3. Defect Reduction and defect stability in IMEC’s 14 nm half pitch chemo-epitaxy DSA flow;Gronheid,2014
4. Kinetics of defect annihilation in DSA of BCP using chemically nanopatterned surfaces;Delagadillo,2014