Author:
Fencil C. R.,Hughes G. P.
Cited by
4 articles.
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1. Status report on X-ray lithography;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;1988-04
2. Radiation Exposure;Semiconductor Lithography;1988
3. A bright pulsed x-ray source for soft x-ray research and processing applications;Radiation Physics and Chemistry (1977);1985-01
4. X-ray lithography for VLSI;Proceedings of the IEEE;1983