Polymer dissolution model: an energy adaptation of the critical ionization theory-Reference-Cited by-同舟云学术

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Polymer dissolution model: an energy adaptation of the critical ionization theory

Published:2009-03-13 Issue: Volume: Page:
ISSN:0277-786X
Container-title:Advances in Resist Materials and Processing Technology XXVI
language:
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Author:

Chauhan Siddharth,Somervell Mark,Scheer Steven,Mack Chris A.,Bonnecaze Roger T.,Willson C. Grant

Publisher

SPIE

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Electrostatic effect on the dissolution kinetics of poly(4-hydroxystyrene) in alkaline aqueous solution;Japanese Journal of Applied Physics;2022-08-01

2. State of polymer chains in alkaline developer studied by dynamic light scattering;Advances in Patterning Materials and Processes XXXIX;2022-05-25

3. Stochastic printing failures in extreme ultraviolet lithography;Journal of Micro/Nanolithography, MEMS, and MOEMS;2018-09-25

4. Mesoscale modeling: a study of particle generation and line-edge roughness;Journal of Micro/Nanolithography, MEMS, and MOEMS;2014-03-12

5. Molecular-Cluster-Assembly Method for Analysis of High-Dimensional Structures of p -Cresol Chains in Phenolic Polymers;Macromolecular Theory and Simulations;2013-08-01

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