Silicon ohmic lateral-contact MEMS switch for RF applications-Reference-Cited by-同舟云学术

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Silicon ohmic lateral-contact MEMS switch for RF applications

Published:2016-12-30 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
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Author:

Rogozhin A.¹,Miakonkikh A.¹,Tatarintsev A.¹,Lebedev K.¹,Kalnov V.¹,Rudenko K.¹,Lukichev V.¹

Affiliation:

1. Institute of Physics and Technology (Russian Federation)

Publisher

SPIE

Reference6 articles.

1. Fabrication and measurements of direct contact type RF MEMS switch

2. Rebeiz, G. M., [RF MEMS Theory, Design, and Technology], New Jersey, J. Wiley Sons (2003).

3. Low-voltage lateral-contact microrelays for RF applications;Wang;IEEE MEMS,2002

4. A Lateral, Self-cleaning, Direct Contact MEMS Switch;Shi;IEEE MEMS,2005

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1. A Review on the Contact Mechanics Modeling of Rough Surfaces in the Elastic Regime: Fundamentals, Theories, and Numerical Implementations;Tribology of Machine Elements - Fundamentals and Applications;2022-06-28

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