Achieving mass fabrication of microoptical systems by combining deep-x-ray lithography, electroforming, micromolding, and embossing-Reference-Cited by-同舟云学术

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Achieving mass fabrication of microoptical systems by combining deep-x-ray lithography, electroforming, micromolding, and embossing

Published:1994-07-28 Issue: Volume: Page:
ISSN:0277-786X
Container-title:Nanofabrication Technologies and Device Integration
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Author:

Abraham Michael,Bauer Hans-Dieter,Ehrfeld Wolfgang,Gerner Mathias M.,Lacher Manfred,Lehr Heinz,Loewe Holger,Michel Andreas,Ruf Andreas,Schift Helmut,Schmidt Andreas,Weber Lutz

Publisher

SPIE

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. An Experimental Investigation of a Micro Injection Molded Mechanical Device;Manufacturing Engineering and Materials Handling, Parts A and B;2005-01-01

2. Three-Dimensional Metallic Microstructures Fabricated by Soft Lithography and Microelectrodeposition;Langmuir;1999-01-14

3. Fabrication of three-dimensional microstructures by electrochemically welding structures formed by microcontact printing on planar and curved substrates;Journal of Microelectromechanical Systems;1998-06

4. Multistep replication processes;Current Opinion in Colloid & Interface Science;1998-04

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