Contact hole shrink process using directed self-assembly-Reference-Cited by-同舟云学术

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Contact hole shrink process using directed self-assembly

Published:2012-03-01 Issue: Volume: Page:
ISSN:0277-786X
Container-title:Alternative Lithographic Technologies IV
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Author:

Seino Yuriko,Yonemitsu Hiroki,Sato Hironobu,Kanno Masahiro,Kato Hikazu,Kobayashi Katsutoshi,Kawanishi Ayako,Azuma Tsukasa,Muramatsu Makoto,Nagahara Seiji,Kitano Takahiro,Toshima Takayuki

Publisher

SPIE

Cited by 21 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Application and Perspectives of Simulation Methods Based on Field Theory in Soft Matter;ACTA POLYM SIN;2024

2. 亚十纳米导向自组装与深紫外混合光刻技术;Laser & Optoelectronics Progress;2022

3. Hemicellulose Block Copolymers for Advanced Lithography Process;Journal of Photopolymer Science and Technology;2019-06-24

4. Mechanisms of Directed Self-Assembly in Cylindrical Hole Confinements;Macromolecules;2018-03-16

5. DSAR;Proceedings of the 2017 ACM on International Symposium on Physical Design;2017-03-19

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