Nanoscale measurements of phosphorous-induced lattice expansion in nanosecond laser annealed germanium-Reference-Cited by-同舟云学术

Nanoscale measurements of phosphorous-induced lattice expansion in nanosecond laser annealed germanium

Published:2018-05 Issue:5 Volume:6 Page:058504
ISSN:2166-532X
Container-title:APL Materials
language:en
Short-container-title:APL Materials

Author:

Boninelli S.¹,Milazzo R.²^ORCID,Carles R.³,Houdellier F.³,Duffy R.⁴^ORCID,Huet K.⁵,La Magna A.⁶,Napolitani E.²^ORCID,Cristiano F.⁷

Affiliation:

1. IMM CNR, Dipartimento di Fisica ed Astronomia, Università di Catania, Via S. Sofia 64, 95123 Catania, Italy

2. Dipartimento Fisica, Università di Padova, Via F. Marzolo 8, 35131 Padova, Italy

3. CEMES-CNRS, 29 Rue Jeanne Marvig, 31055 Toulouse, France

4. Tyndall National Institute, University College Cork, Lee Maltings, Cork, Ireland

5. Laser Systems and Solutions of Europe (LASSE), SCREEN Semiconductor Solutions, Co., Ltd., 14-38 Rue Alexandre, 92230 Gennevilliers, France

6. IMM CNR, Zona Industriale, Strada VIII 5, 95100 Catania, Italy

7. LAAS-CNRS, 7 Ave. du Colroy la Roche, F-31400 Toulouse, France

Publisher

AIP Publishing

Subject

General Engineering,General Materials Science

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5022876

Reference35 articles.

1. Academic and industry research progress in germanium nanodevices

2. Device Requirements for Optical Interconnects to Silicon Chips

3. Monolithically Integrated Ge-on-Si Active Photonics

4. M. J. Adams and P. T. Landsberg, in Proceedings of the 9th International Conference on the Physics of Semiconductors, Moscow (Akademiya Nauk, 1968), p. 619.

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