An x‐ray diffraction method for measuring thicknesses of epitaxial thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.343732
Reference5 articles.
1. Gauging film thickness: A comparison of an x‐ray diffraction technique with Rutherford backscattering spectrometry
2. XXXIV. The theory of X-ray reflexion
3. Oscillations in the surface structure of Sn-doped GaAs during growth by MBE
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