1. Synthesis and Real Structure, Institute for Material Science, Kiel University, Kaiserstr. 2, D-24143 Kiel, Germany
2. Materials and Processes for Micro/Nanosystem Technologies, Institute for Material Science, Kiel University, Kaiserstr. 2, D-24143 Kiel, Germany
3. Fraunhofer Institute for Silicon Technology (ISIT), Fraunhoferstr. 1, D-25524 Itzehoe, Germany
4. Institute of Physics & IRIS Adlershof, Humboldt-Universität zu Berlin, Newtonstr. 15, D-12489 Berlin, Germany
5. Fraunhofer Institute for Applied Solid State Physics, IAF, Tullastr. 72, 79108 Freiburg, Germany