Note: Simple 100 Hz N2 laser with longitudinal discharge tube and high-voltage power supply using neon sign transformer
Author:
Affiliation:
1. Graduate Faculty of Interdisciplinary Research Faculty of Engineering, University of Yamanashi, 4-3-11 Takeda, Kofu, Yamanashi 400-8511, Japan
2. Institute of Laser Engineering, Osaka University, 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5009179
Reference12 articles.
1. High-repetition-rate (6kHz) and long-pulse-duration (50ns) ArF excimer laser for sub-65nm lithography
2. Electric-discharge high-peak-power CO2laser
3. Short-pulse CO2 laser with longitudinal tandem discharge tube
4. Oscillation and gain characteristics of longitudinally excited VUV F2 laser at 40 Torr total pressure
5. XeCl excimer laser excited by longitudinal discharge
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