Photoelectrochemical etching of high aspect ratio submillimeter waveguide filters fromn+GaAs wafers
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.108039
Reference12 articles.
1. Improved performance of GaAs microwave field-effect transistors with low inductance via-connections through the substrate
2. Characteristics and applications of advanced technology microchannel plates
3. Photonic band structure: The face-centered-cubic case employing nonspherical atoms
4. Selective GaAs/AlxGa1−xAs reactive ion etching using CCl2F2
5. Localized laser etching of compound semiconductors in aqueous solution
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1. Fabricating Vertical Sidewalls in GaAs∕AlGaAs Heterostructure Using Light-Induced Wet Etching;Journal of The Electrochemical Society;2006
2. Effect of photoelectrochemical oxidation on properties of GaN epilayers grown by molecular beam epitaxy;Applied Physics Letters;2001-02-26
3. Photoelectrochemical etching of semiconductors;IBM Journal of Research and Development;1998-09
4. Deep ultraviolet enhanced wet chemical etching of gallium nitride;Applied Physics Letters;1998-02-23
5. Hydration effects in the photoassisted wet chemical etching of gallium nitride;IEEE Journal of Selected Topics in Quantum Electronics;1998
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