Applying Tersoff-potential and bond-softening models in a molecular dynamics study of femtosecond laser processing
Author:
Affiliation:
1. Department of Mechanical Engineering, Seoul National University, Seoul 08826, South Korea
2. Department of Mechanical and System Design Engineering, Hongik University, Seoul 04066, South Korea
Funder
National Research Foundation of Korea
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5096013
Reference57 articles.
1. Short pulse laser micro/nano manufacturing: fundamentals and applications
2. Single- and multi-pulse formation of surface structures under static femtosecond irradiation
3. Femtosecond versus nanosecond laser machining: comparison of induced stresses and structural changes in silicon wafers
4. Numerical modeling of ultrashort-pulse laser ablation of silicon
5. Pulsed laser evaporation: equation-of-state effects
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1. Material removal on silicon towards atomic and close-to-atomic scale by infrared femtosecond laser;Materials Science in Semiconductor Processing;2023-05
2. Molecular dynamics simulation of structural evolution in crystalline and amorphous CuZr alloys upon ultrafast laser irradiation;Physical Review Materials;2022-12-07
3. Empirical MD Simulations of Laser-Excited Matter;Materials Interaction with Femtosecond Lasers;2021
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