Mechanical characterization of suspended GaN microstructures fabricated by GaN-on-patterned-silicon technique
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2167813
Reference24 articles.
1. Room‐temperature continuous‐wave operation of InGaN multi‐quantum‐well structure laser diodes
2. GaN: Processing, defects, and devices
3. Fabrication of GaN suspended microstructures
4. Photoelectrochemical undercut etching for fabrication of GaN microelectromechanical systems
5. Fabrication of GaN cantilevers on silicon substrates for microelectromechanical devices
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