Low-pressure CO2 discharges: 1D modeling

Abstract

A 1D model of glow low-pressure CO2 discharges is developed. In the framework of this model, simulation of stationary and repetitively pulsed discharges at pressure ranging from 0.5 to 5 Torr and current from 10 to 50 mA is performed. The obtained plasma characteristics are compared with the available experimental results and with the data evaluated based on the approximate 0D approach. The results of 0D and 1D calculations agree for most of plasma parameters, except for the molar fraction of CO molecules produced at CO2 dissociation by electron impact. Agreement between the measured and calculated, in the framework of the 1D model, values of the CO molar fraction is provided by modifying the expression of the dissociation rate constant vs the reduced electric field.