Structural and electrical characteristics of SrTiO3 thin films for dynamic random access memory applications
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.353960
Reference16 articles.
1. Ferroelectric materials for 64 Mb and 256 Mb DRAMs
2. Rapid isothermal processing
3. Electrical conductivity of sputtered films of strontium titanate
4. Interface Structure and Dielectric Properties of SrTiO3 Thin Film Sputter-Deposited onto Si Substrates
5. SrTiO3Thin Film Preparation by Ion Beam Sputtering and Its Dielectric Properties
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