Adhesion layer-bottom electrode interaction during BaxSr1−xTiO3 growth as a limiting factor for device performance
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4730781
Reference36 articles.
1. Tunable Solidly Mounted Thin Film Bulk Acoustic Resonators Based on Ba$_{x}{{\hbox{Sr}}_{1-x}}{\hbox{TiO}}_{3}$ Films
2. Prediction of BAW resonator performance using experimental and numerical methods
3. Effect of interface roughness on acoustic loss in tunable thin film bulk acoustic wave resonators
4. Analysis of the stress and interfacial reactions in Pt/Ti/SiO2/Si for use with ferroelectric thin films
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