Size effect of Young's modulus in AlN thin layers-Reference-Cited by-同舟云学术

Size effect of Young's modulus in AlN thin layers

Published:2014-09-28 Issue:12 Volume:116 Page:124306
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Hähnlein Bernd¹,Schaaf Peter²,Pezoldt Jörg¹

Affiliation:

1. FG Nanotechnologie, Institut für Mikro- und Nanotechnologien MacroNano® and Institut für Mikro- und Nanoelektronik, Technische Universität Ilmenau, Postfach 100565, 98693 Ilmenau, Germany

2. FG Werkstoffe der Elektrotechnik, Institut für Mikro- und Nanotechnologien MacroNano® and Institut für Werkstofftechnik, Technische Universität Ilmenau, Postfach 100565, 98693 Ilmenau, Germany

Funder

Thüringer Ministerium für Bildung, Wissenschaft und Kultur (Thuringian Ministry of Education, Science and Culture)

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4896496

Reference32 articles.

1. Yoctocalorimetry: phonon counting in nanostructures

2. Attogram detection using nanoelectromechanical oscillators

3. Zeptogram-Scale Nanomechanical Mass Sensing

4. The size-dependent bending elastic properties of nanobeams with surface effects

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