Elastic moduli, strength, and fracture initiation at sharp notches in etched single crystal silicon microstructures
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.369711
Reference58 articles.
1. Young’s modulus measurements of thin films using micromechanics
2. Silicon Torsional Scanning Mirror
3. Silicon as a mechanical material
4. Stress‐related problems in silicon technology
5. Fracture initiation at sharp notches in single crystal silicon
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