Effect of Mo-Cu cathode composition on process stability, macroparticle formation, plasma generation, and thin-film deposition in DC arc synthesis
Author:
Affiliation:
1. Thin Film Physics Division, Department of Physics, Chemistry and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden
2. PLANSEE Composite Materials GmbH, Siebenburgerstraße 23, 86983 Lechbruck am See, Germany
Funder
Swedish research council
Knut och Alice Wallenbergs Stiftelse
Swedish Government Strategic Research Area in Materials Science on Functional Materials
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5128056
Reference23 articles.
1. Properties of WCu, MoCu, and Cu/MoCu/Cu High-performance Heat Sink Materials and Manufacturing Technologies
2. G. Chen, G. Wu, D. Zhu and Q. Zhang, “The thermo-physical properties of high dense Mo/Cu composites fabricated by squeeze casting technology,” in Electronic Packaging Technology, 2005 6th International Conference on (IEEE) (IEEE, 2005), pp. 321–324.
3. The Cu-Mo (Copper-Molybdenum) system
4. Vacuum arc plasma generation and thin film deposition from a TiB2cathode
5. Macroparticle generation in DC arc discharge from a WC cathode
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. A comparison of plasma generation, plasma transport, and film formation for a DC vacuum arc source with Ti–X compound cathodes (X = W, C, Al, and Si);Journal of Applied Physics;2023-06-16
2. On the expansion of non-ideal copper plasma into vacuum;Physics of Plasmas;2020-08
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