Dynamics of hydrogenated amorphous silicon flexural resonators for enhanced performance-Reference-Cited by-同舟云学术

Dynamics of hydrogenated amorphous silicon flexural resonators for enhanced performance

Published:2016-04-21 Issue:15 Volume:119 Page:154501
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Mouro J.¹,Chu V.¹,Conde J. P.¹²^ORCID

Affiliation:

1. Instituto de Engenharia de Sistemas E Computadores-Microsistemas e Nanotecnologias (INESC MN) and IN-Institute of Nanoscience and Nanotechnology, Rua Alves Redol, 9, 1000-029 Lisbon, Portugal

2. Department of Bioengineering, Instituto Superior Técnico, University of Lisbon, Lisbon 1049-001, Portugal

Funder

Institute of Nanoscience and Nanotechnology

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4946040

Reference39 articles.

1. Hydrogenated Amorphous Silicon

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3. Amorphous Si:H Linear Image Sensor Operated by a-Si:H TFT Array

4. A New Linear Array Thin Film Position Sensitive Detector (LTFPSD) for 3D Measurements

5. Clinical evaluation of a full-field digital-projection radiography detector

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