1. Laboratory for Microactuators, Department of Microsystems Engineering - IMTEK, University of Freiburg, Georges-Koehler-Allee 102, 79110 Freiburg, Germany
2. Institute of Microstructure Technology (IMT), Karlsruhe Institute of Technology (KIT), Herman-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany
3. Laboratory for Materials Processing, Department of Microsystems Engineering - IMTEK, University of Freiburg, Georges-Koehler-Allee 102, 79110 Freiburg, Germany