Quantitative measurement of sheet resistance by evanescent microwave probe
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1891296
Reference11 articles.
1. Scanning tip microwave near‐field microscope
2. High spatial resolution quantitative microwave impedance microscopy by a scanning tip microwave near-field microscope
3. Quantitative microwave near-field microscopy of dielectric properties
4. Measurement of the sheet resistance of doped layers in semiconductors by microwave reflection
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