Nonlinear dynamics for estimating the tip radius in atomic force microscopy
Author:
Affiliation:
1. Department of Precision and Microsystems Engineering, TU Delft, Mekelweg 2, 2628CD Delft, The Netherlands
Funder
European Commission (EC)
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4991471
Reference19 articles.
1. Atomic Force Microscope
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4. Towards fast AFM-based nanometrology and nanomanufacturing
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