Physical understanding of different drain-induced-barrier-lowering variations in high-k/metal gate n-channel metal-oxide-semiconductor-field-effect-transistors induced by charge trapping under normal and reverse channel hot carrier stresses

Author:

Luo Weichun,Yang Hong,Wang Wenwu,Zhao Lichuan,Xu Hao,Ren Shangqing,Tang Bo,Tang Zhaoyun,Xu Yefeng,Xu Jing,Yan Jiang,Zhao Chao,Chen Dapeng,Ye Tianchun

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Reference20 articles.

1. Review on high-k dielectrics reliability issues

2. R. Degraeve, M. Aoulaiche, B. Kaczer, Ph. Roussel, T. Kauerauf, S. Sahhaf, and G. Groeseneken, in 15th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits, Singapore (2008), pp. 239.

3. High dielectric constant oxides

4. Magnitude of the threshold energy for hot electron damage in metal–oxide–semiconductor field effect transistors by hydrogen desorption

5. S. E. Rauch, G. La Rosa, and F. J. Guarin, in 39th Annual Proceedings: International Reliability Physics Symposium 2001, Orlando, USA, 30 April–3 May 2001 (2001), pp. 399–405.

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