Highly efficient diamond electromechanical transducer based on released metal–oxide–semiconductor structure-Reference-Cited by-同舟云学术

Highly efficient diamond electromechanical transducer based on released metal–oxide–semiconductor structure

Published:2021-08-16 Issue:7 Volume:119 Page:073504
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Liao Meiyong¹^ORCID,Sang Liwen²³^ORCID,Sun Huanying¹,Li Tiefu⁴,Koizumi Satoshi¹

Affiliation:

1. Research Center for Functional Materials, National Institute for Materials Sciences (NIMS), Namiki 1-1, Tsukuba, Ibaraki 305-0044, Japan

2. International Center for Materials Nanoarchitectonics (MANA), NIMS, Namiki 1-1, Tsukuba, Ibaraki 305-0044, Japan

3. JST-PRESTO, The Japan Science and Technology Agency, Tokyo 102-0076, Japan

4. Institute of Microelectronics and Frontier Science Center for Quantum Information, Tsinghua University, Beijing 100084, China

Funder

Ministry of Education, Culture, Sports, Science and Technology

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0058646

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