Low-resistance Ohmic contacts for high-power GaN field-effect transistors obtained by selective area growth using plasma-assisted molecular beam epitaxy
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2234566
Reference15 articles.
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3. DC and microwave performance of recessed-gate GaN MESFETs using ICP-RIE
4. Systematic characterization of Cl2 reactive ion etching for improved ohmics in AlGaN/GaN HEMTs
5. Low-resistance Ti/Al/Ti/Au multilayer ohmic contact to n-GaN
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