Studies of SiC formation on Si (100) by chemical vapor deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.335420
Reference35 articles.
1. High-Temperature Electronic Requirements in Aeropropulsion Systems
2. Growth, Texture, and Surface Morphology of SiC Layers
3. Vapor-Phase Deposition of Beta-Silicon Carbide on Silicon Substrates
4. Production of large‐area single‐crystal wafers of cubic SiC for semiconductor devices
5. New types of high efficiency solar cells based ona‐Si
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