Subject
General Physics and Astronomy
Cited by
69 articles.
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1. Anodic Bonding;3D and Circuit Integration of MEMS;2021-04-23
2. Modeling of anodic bonding with SiO2 dielectric as interlayer;Journal of Micromechanics and Microengineering;2020-07-09
3. Anodic bonding;Handbook of Silicon Based MEMS Materials and Technologies;2020
4. A Path Beyond Metal and Silicon:Polymer/Nanomaterial Composites for Stretchable Strain Sensors;Advanced Functional Materials;2019-02-18
5. Anodic Bonding;Handbook of Silicon Based MEMS Materials and Technologies;2015