Germanium hut nanostressors on freestanding thin silicon membranes
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2031941
Reference17 articles.
1. Elastic strain relaxation in free-standing SiGe/Si structures
2. Structural properties of self-organized semiconductor nanostructures
3. Extensions of the Stoney formula for substrate curvature to configurations with thin substrates or large deformations
4. Direct measurement of crystal surface stress
5. Mechanical stresses in (sub)monolayer epitaxial films
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