GaAs surface cleaning by low-energy hydrogen ion bombardment at moderate temperatures
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1836858
Reference36 articles.
1. Surface Cleaning of Si-Doped/Undoped GaAs Substrates
2. Direct Observation of Species Liberated from GaAs Native Oxides during Atomic Hydrogen Cleaning
3. GaAs surface cleaning by low energy hydrogen ion beam treatment
4. Dry Hydrogen Plasma Cleaning for Local Epitaxial Growth
5. Hydrogen-related defects in crystalline semiconductors: a theorist's perspective
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