Unpinned metal gate/high-κ GaAs capacitors: Fabrication and characterization
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2234837
Reference15 articles.
1. Interface charge and nonradiative carrier recombination in Ga[sub 2]O[sub 3]–GaAs interface structures
2. Scanning tunneling microscopy and spectroscopy of gallium oxide deposition and oxidation on GaAs(001)-c(2×8)/(2×4)
3. Self-aligned GaAs p-channel enhancement mode MOS heterostructure field-effect transistor
4. High mobility NMOSFET structure with high-/spl kappa/ dielectric
5. GaAs metal–oxide–semiconductor field-effect transistor with nanometer-thin dielectric grown by atomic layer deposition
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