Velocity boundary conditions for positive ions entering radio-frequency sheaths in electronegative plasmas
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4997168
Reference46 articles.
1. Analytical solution for capacitive RF sheath
2. Dynamics of a collisional, capacitive RF sheath
3. Dynamic model of the electrode sheaths in symmetrically driven rf discharges
4. Dynamic model of the radio-frequency plasma sheath in a highly asymmetric discharge cell
5. Sheath model for radio-frequency-biased, high-density plasmas valid for allω/ωi
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