Enhanced electrochemical etching of ion irradiated silicon by localized amorphization
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4876917
Reference25 articles.
1. Point defects in MeV ion-implanted silicon studied by deep level transient spectroscopy
2. Lifetime in proton irradiated silicon
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4. The effect of ion induced damage on IBIC images
5. Defect enhanced funneling of diffusion current in silicon
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3. Photoluminescence enhancement and high accuracy patterning of lead halide perovskite single crystals by MeV ion beam irradiation;Journal of Materials Chemistry C;2020
4. A review: mid-infrared photonic crystals in silicon and porous silicon based on ion beam irradiation;SPIE Proceedings;2014-11-13
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