A compact interferometer using moire effect for the phase compensation
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1143283
Reference14 articles.
1. Real‐time phase microscopy using a phase‐lock interferometer
2. Surface profile measurement with a scanning differential ac interferometer
3. Scanning differential phase contrast optical microscope: application to surface studies
4. Measurement of surface topography of magnetic tapes by Mirau interferometry
5. Differential thickness measurement using a polarization interferometer
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Short-range displacement detection from speckle interference using transparent thin-film photodiode;Journal of Optics A: Pure and Applied Optics;2000-09-21
2. Standing wave detection and interferometer application using a photodiode thinner than optical wavelength;Applied Physics Letters;1999-10-04
3. A double‐focus lens interferometer for scanning force microscopy;Review of Scientific Instruments;1995-05
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