Tailoring of structure formation and phase composition in reactively sputtered zirconium oxide films using nitrogen as an additional reactive gas
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2903492
Reference20 articles.
1. Modification of the optical and structural properties of dielectric ZrO2films by ion‐assisted deposition
2. Growth and characterization of zirconium oxynitride films prepared by reactive direct current magnetron sputtering
3. Fundamental understanding and modeling of reactive sputtering processes
4. Energy Analysis of High-Energy Neutral Atoms in the Sputtering of ZnO and BaTiO3
5. Energetic oxygen particles in the reactive sputtering of Zn targets in Ar/O2 atmospheres
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3. Evolution of target condition in reactive HiPIMS as a function of duty cycle: An opportunity for refractive index grading;Journal of Applied Physics;2017-05-07
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