New ripple patterns observed in excimer-laser irradiated SiO2/polycrystalline silicon/SiO2 structures
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.119230
Reference5 articles.
1. Semiconductor Surface Damage Produced by Ruby Lasers
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5. Surface roughness effects in laser crystallized polycrystalline silicon
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