Ni-imprint induced solid-phase crystallization in Si1−xGex (x: 0–1) on insulator
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2764447
Reference13 articles.
1. Solid-phase crystallization of Si1−xGex alloy layers
2. Solid-phase crystallization of amorphous SiGe films deposited by LPCVD on SiO2 and glass
3. Ge fraction dependent improved thermal stability ofin situdoped boron in polycrystalline Si1−xGex (0⩽x⩽0.5) films on SiON
4. Silicide formation and silicide‐mediated crystallization of nickel‐implanted amorphous silicon thin films
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