Author:
Jha C. M.,Bahl G.,Melamud R.,Chandorkar S. A.,Hopcroft M. A.,Kim B.,Agarwal M.,Salvia J.,Mehta H.,Kenny T. W.
Subject
Physics and Astronomy (miscellaneous)
Reference14 articles.
1. MEMS technology for timing and frequency control
2. Stability of wafer level vacuum encapsulated single-crystal silicon resonators
3. An integrated CMOS micromechanical resonator high-Q oscillator
4. M. J. Madou, Fundamentals of Microfabrication, 2nd ed. (CRC, New York, 1997), pp. 204–207.
5. The 13th International Conference on Solid-State Sensors, Actuators, and Microsystems;Melamud R.
Cited by
36 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献